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1

Patterning critical dimension control for advanced logic nodes

Le-Gratiet, Bertrand, De-Caunes, Jean, Gatefait, Maxime, Lam, Auguste, Ostrovsky, Alain, Planchot, Jonathan, Farys, Vincent, Ducoté, Julien, Mikolajczak, Marc, Morin, Vincent, Chojnowski, Nicolas, Sun

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2015

Language:

english

File:

PDF, 7.40 MB

english, 2015

2

All-Optical, All-Fibered Ultrafast Switching in 2-D InP-Based Photonic Crystal Nanocavity

Brunstein, M., Yacomotti, A.M., Braive, R., Barbay, S., Sagnes, I., Bigot, L., Le-Gratiet, L., Levenson, J.A.

Journal:

IEEE Photonics Journal

Year:

2010

Language:

english

File:

PDF, 755 KB

english, 2010

3

SPIE Proceedings [SPIE 28th European Mask and Lithography Conference (EMLC 2012) - Dresden, Germany (Tuesday 17 January 2012)] 28th European Mask and Lithography Conference - Investigation and mitigation of field-edge CDU fingerprint for ArFi lithography for 45-nm to sub-28-nm logic nodes

Le-Gratiet, Bertrand, Finders, Jo, Mouraille, Orion, Queens, Rene, Escalante, Maryana, Smeets, Bart, Beltman, Jan, Jullian, Karine, Behringer, Uwe F.W., Maurer, Wilhelm

Year:

2012

Language:

english

File:

PDF, 1.85 MB

english, 2012

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Advanced Etch Technology for Nanopatterning III - 28nm FDSOI high-K metal gate CD variability investigation

Oehrlein, Gottlieb S., Lin, Qinghuang, Zhang, Ying, Desvoivres, L., Gouraud, P., Le Gratiet, B., Bouyssou, R., Ranica, R., Gallon, C., Thomas, I.

Year:

2014

Language:

english

File:

PDF, 623 KB

english, 2014

5

Fine-pattern lithography for large substrates using a holographic mask-aligner

A.R. Nobari, S. Gray, F. Clube, D. Struchen, S. Malfoy, N. Magnon, B. Le Gratiet

Journal:

Microelectronic Engineering

Year:

1998

Language:

english

File:

PDF, 277 KB

english, 1998

6

Nondestructive mapping of chemical composition and structural qualities of group III-nitride nanowires using submicron beam synchrotron-based X-ray diffraction

Bonanno, P.L., Gautier, S., Gmili, Y.El., Moudakir, T., Sirenko, A.A., Kazimirov, A., Cai, Z.-H., Martin, J., Goh, W.H., Martinez, A., Ramdane, A., Le Gratiet, L., Maloufi, N., Assouar, M.B., Ougazzad

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 851 KB

english, 2013

7

Asymptotic analysis of the learning curve for Gaussian process regression

Le Gratiet, Loic, Garnier, Josselin

Journal:

Machine Learning

Year:

2015

Language:

english

File:

PDF, 486 KB

english, 2015

8

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Metrology, Inspection, and Process Control for Microlithography XXIX - Scatterometry-based metrology for the 14nm node double patterning lithography

Cain, Jason P., Sanchez, Martha I., Carau, D., Bouyssou, R., Ducoté, J., Dettoni, F., Ostrovsky, A., Le Gratiet, B., Dezauzier, C., Besacier, M., Gourgon, C.

Year:

2015

Language:

english

File:

PDF, 1.27 MB

english, 2015

9

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Metrology, Inspection, and Process Control for Microlithography XXVI - Integration and automation of DoseMapper in a logic fab APC system: application for 45/40/28nm node

Le Gratiet, Bertrand, Salagnon, Christophe, de Caunes, Jean, Mikolajczak, Marc, Morin, Vincent, Chojnowski, Nicolas, Sundermann, Frank, Massin, Jean, Pelletier, Alice, Metz, Joel, Blancquaert, Yoann,

Year:

2012

Language:

english

File:

PDF, 5.73 MB

english, 2012

10

SPIE Proceedings [SPIE Photomask and NGL Mask Technology XIX - Yokohama, Japan (Tuesday 17 April 2012)] Photomask and Next-Generation Lithography Mask Technology XIX - Mask CD uniformity metrology for logic patterning and its correlation to wafer data

Le Gratiet, Bertrand, Zékri, Raphaël, Sundermann, Frank, Trautzsch, Thomas, Thaler, Thomas, Birkner, Robert, Buttgereit, Ute, Kato, Kokoro

Year:

2012

Language:

english

File:

PDF, 1.54 MB

english, 2012

11

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Metrology, Inspection, and Process Control for Microlithography XXIII - Intrafield process control for 45 nm CMOS logic patterning

Le Gratiet, Bertrand, Allgair, John A., Raymond, Christopher J., Massin, Jean, Ostrovski, Alain, Monget, Cedric, Decaux, Marianne, Thivolle, Nicolas, Faure, Romuald, Baron, Fabrice, Chapon, Jean-Damie

Year:

2009

Language:

english

File:

PDF, 834 KB

english, 2009

12

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Metrology, Inspection, and Process Control for Microlithography XXIV - Improved CD control for 45-40 nm CMOS logic patterning: anticipation for 32-28 nm

Le Gratiet, Bertrand, Raymond, Christopher J., Sundermann, Frank, Massin, Jean, Decaux, Marianne, Thivolle, Nicolas, Baron, Fabrice, Ostrovsky, Alain, Monget, Cedric, Chapon, Jean Damien, Blancquaert,

Year:

2010

Language:

english

File:

PDF, 1017 KB

english, 2010

13

Model Assisted Probability of Detection Curves: New Statistical Tools and Progressive Methodology

Le Gratiet, Loïc, Iooss, Bertrand, Blatman, Géraud, Browne, Thomas, Cordeiro, Sara, Goursaud, Benjamin

Journal:

Journal of Nondestructive Evaluation

Year:

2017

Language:

english

File:

PDF, 2.79 MB

english, 2017

14

Laterally coupled distributed feedback lasers emitting at 2 μ m with quantum dash active region and high-duty-cycle etched semiconductor gratings

Papatryfonos, Konstantinos, Saladukha, Dzianis, Merghem, Kamel, Joshi, Siddharth, Lelarge, Francois, Bouchoule, Sophie, Kazazis, Dimitrios, Guilet, Stephane, Le Gratiet, Luc, Ochalski, Tomasz J., Huye

Journal:

Journal of Applied Physics

Year:

2017

Language:

english

File:

PDF, 2.43 MB

english, 2017

15

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Metrology, Inspection, and Process Control for Microlithography XXXI - Robust 2D patterns process variability assessment using CD-SEM contour extraction offline metrology

Sanchez, Martha I., Ukraintsev, Vladimir A., Lakcher, Amine, Le-Gratiet, Bertrand, Ducoté, Julien, Fanton, Pierre, Kiers, Ton, Gemmink, Jan-Willem, Hunsche, Stefan, Prentice, Christopher, Besacier, Ma

Year:

2017

Language:

english

File:

PDF, 7.11 MB

english, 2017

16

SPIE Proceedings [SPIE 32nd European Mask and Lithography Conference - Dresden, Germany (Tuesday 21 June 2016)] 32nd European Mask and Lithography Conference - Translation of lithography variability into after-etch performance: monitoring of golden hotspot

Behringer, Uwe F.W., Finders, Jo, Finders, Jo, Kiers, Ton, Le Gratiet, Bertrand, Lakcher, Amine

Year:

2016

Language:

english

File:

PDF, 1.81 MB

english, 2016

17

Lasing in topological edge states of a one-dimensional lattice

St-Jean, P., Goblot, V., Galopin, E., Lemaître, A., Ozawa, T., Le Gratiet, L., Sagnes, I., Bloch, J., Amo, A.

Journal:

Nature Photonics

Year:

2017

Language:

english

File:

PDF, 1.34 MB

english, 2017

18

Nonlinear polariton localization in strongly coupled driven-dissipative microcavities

Rahimzadeh Kalaleh Rodriguez, Said, Amo, Alberto, Carusotto, Iacopo, Sagnes, Isabelle, Le Gratiet, Luc, Galopin, Elisabeth, Lemaitre, Aristide, Bloch, Jacqueline

Journal:

Year:

2017

Language:

english

File:

PDF, 1.51 MB

english, 2017

19

Nonlinear Polariton Fluids in a Flatband Reveal Discrete Gap Solitons

Goblot, V., Rauer, B., Vicentini, F., Le Boité, A., Galopin, E., Lemaître, A., Le Gratiet, L., Harouri, A., Sagnes, I., Ravets, S., Ciuti, C., Amo, A., Bloch, J.

Journal:

Physical Review Letters

Year:

2019

Language:

english

File:

PDF, 1.55 MB

english, 2019

20

Submicron beam X-ray diffraction of nanoheteroepitaxily grown GaN: Experimental challenges and calibration procedures

P.L. Bonanno, S. Gautier, A.A. Sirenko, A. Kazimirov, Z.-H. Cai, W.H. Goh, J. Martin, A. Martinez, T. Moudakir, N. Maloufi, M.B. Assouar, A. Ramdane, L. Le Gratiet, A. Ougazzaden

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2010

Language:

english

File:

PDF, 371 KB

english, 2010

21

Pt and Pt/Cu carbonyl clusters synthesized by radiolysis

B. Le Gratiet, H. Remita, G. Picq, M.O. Delcourt

Journal:

Radiation Physics and Chemistry

Year:

1996

Language:

english

File:

PDF, 473 KB

english, 1996

22

One-step nano-selective area growth (nano-SAG) of localized InAs/InP quantum dots: First step towards single-photon source applications

N. Gogneau, L. Le Gratiet, E. Cambril, G. Beaudoin, G. Patriarche, A. Beveratos, R. Hostein, I. Robert-Philip, J.Y. Marzin, I. Sagnes

Journal:

Journal of Crystal Growth

Year:

2008

Language:

english

File:

PDF, 416 KB

english, 2008

23

Structural and optical properties of nanodots, nanowires, and multi-quantum wells of III-nitride grown by MOVPE nano-selective area growth

W.H. Goh, G. Patriarche, P.L. Bonanno, S. Gautier, T. Moudakir, M. Abid, G. Orsal, A.A. Sirenko, Z.-H. Cai, A. Martinez, A. Ramdane, L. Le Gratiet, D. Troadec, A. Soltani, A. Ougazzaden

Journal:

Journal of Crystal Growth

Year:

2011

Language:

english

File:

PDF, 1.47 MB

english, 2011

24

Indistinguishable single photons from a single InAs quantum dot in a photonic crystal slab cavity

Stéphane Laurent, Spyros Varoutsis, Luc Le Gratiet, Aristide Lemaître, Isabelle Sagnes, Fabrice Raineri, Isabelle Robert-Philip, Izo Abram

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2006

Language:

english

File:

PDF, 150 KB

english, 2006

25

Selective growth of GaN nanodots and nanostripes on 6H-SiC substrates by metal organic vapor phase epitaxy

W. H. Goh, J. Martin, S. Ould-Saad, S. Gautier, A. A. Sirenko, A. Martinez, L. Le Gratiet, A. Ramdane, N. Maloufi, A. Ougazzaden

Journal:

physica status solidi (c)

Year:

2009

Language:

english

File:

PDF, 356 KB

english, 2009

26

Picosecond photodiffraction in semiconductor multiquantum wells and microcavities

Jean-Louis Iehl, Rodolphe Grac, Luc le Gratiet, Véronique Bardinal, Rainer Buhleier, Elena Bedel-Pereira, Chantal Fontaine, Michel Pugnet, Jacques-Henry Collet

Journal:

annals of telecommunications - annales des télécommunications

Year:

1997

Language:

english

File:

PDF, 1.05 MB

english, 1997

27

Ultra-fast nonlinear response around 1.5 μm in 2D AlGaAs/AlOx photonic crystal

A. M. Yacomotti, F. Raineri, G. Vecchi, I. Sagnes, M. Strassner, L. Le Gratiet, R. Raj, A. Levenson

Journal:

Applied Physics B: Lasers and Optics

Year:

2005

Language:

english

File:

PDF, 357 KB

english, 2005

28

Antimonide-based lasers and DFB laser diodes in the 2–2.7

D. Barat, J. Angellier, A. Vicet, Y. Rouillard, L. Le Gratiet, S. Guilet, A. Martinez, A. Ramdane

Journal:

Applied Physics B: Lasers and Optics

Year:

2008

Language:

english

File:

PDF, 496 KB

english, 2008

29

New approach of Nano-Selective Area Growth (NSAG) for a precise control of GaN nanodots grown by MOVPE

J. Martin, A. Martinez, W.H. Goh, S. Gautier, N. Dupuis, L. Le Gratiet, J. Decobert, A. Ramdane, N. Maloufi, A. Ougazzaden

Journal:

Materials Science and Engineering: B

Year:

2008

Language:

english

File:

PDF, 829 KB

english, 2008

30

CO-Stabilized Supported Pt Catalysts for Fuel Cells: Radiolytic Synthesis

B.Le Gratiet, H. Remita, G. Picq, M.O. Delcourt

Journal:

Journal of Catalysis

Year:

1996

Language:

english

File:

PDF, 493 KB

english, 1996

31

High contrast reflection modulation near 1.55μm in InP 2D photonic crystals on silicon wafer

Vecchi, Gabriele, Raineri, Fabrice, Sagnes, Isabelle, Lee, Ko-Hsin, Guilet, Stéphane, Le Gratiet, Luc, Talneau, Anne, Levenson, Ariel, Raj, Rama, Van Laere, Frederik

Journal:

Year:

2007

Language:

english

File:

PDF, 659 KB

english, 2007

32

Continuous-wave operation of photonic band-edge laser near 1.55 µm on silicon wafer

Vecchi, G., Raineri, F., Sagnes, I., Yacomotti, A., Monnier, P., Karle, T. J., Lee, K.-H., Braive, R., Le Gratiet, L., Guilet, S.

Journal:

Year:

2007

Language:

english

File:

PDF, 284 KB

english, 2007

33

Small volume excitation and enhancement of dye fluorescence on a 2D photonic crystal surface

Estrada, L. C., Martinez, O. E., Brunstein, M., Bouchoule, S., Le-Gratiet, L., Talneau, A., Sagnes, I., Monnier, P., Levenson, J. A., Yacomotti, A. M.

Journal:

Year:

2010

Language:

english

File:

PDF, 651 KB

english, 2010

34

Surface-emitting mid-infrared quantum cascade lasers with high-contrast photonic crystal resonators

Xu, Gangyi, Colombelli, Raffaele, Braive, Remy, Beaudoin, Gregoire, Le Gratiet, Luc, Talneau, Anne, Ferlazzo, Laurence, Sagnes, Isabelle

Journal:

Year:

2010

Language:

english

File:

PDF, 1.84 MB

english, 2010

35

Demonstration of coherent emission from high-β photonic crystal nanolasers at room temperature

Hostein, R., Braive, R., Le Gratiet, L., Talneau, A., Beaudoin, G., Robert-Philip, I., Sagnes, I., Beveratos, A.

Journal:

Year:

2010

Language:

english

File:

PDF, 332 KB

english, 2010

36

Deformable two-dimensional photonic crystal slab for cavity optomechanics

Antoni, Thomas, Kuhn, Aurélien G., Briant, Tristan, Cohadon, Pierre-François, Heidmann, Antoine, Braive, Rémy, Beveratos, Alexios, Abram, Izo, Gratiet, Luc Le, Sagnes, Isabelle

Journal:

Year:

2011

Language:

english

File:

PDF, 299 KB

english, 2011

37

Structural analysis of site-controlled InAs/InP quantum dots

B. Fain, D. Elvira, L. Le Gratiet, L. Largeau, G. Beaudoin, D. Troadec, I. Abram, A. Beveratos, I. Robert-Philip, G. Patriarche, I. Sagnes

Journal:

Journal of Crystal Growth

Year:

2011

Language:

english

File:

PDF, 521 KB

english, 2011

38

SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Nanophotonics II - Photonic crystal nanolasers with controlled spontaneous emission

Braive, R., Andrews, David L., Nunzi, Jean-Michel, Beveratos, A., Sagnes, I., Ostendorf, Andreas, Lecamp, G., Guilet, S., Le Gratiet, L., Lemaître, A., Miard, A., Patriarche, G., Sauvan, C., Lalanne,

Year:

2008

Language:

english

File:

PDF, 266 KB

english, 2008

39

Room temperature spontaneous emission enhancement from quantum dots in photonic crystal slab cavities in the telecommunications C band

Hostein, R., Braive, R., LarqueÌ, M., Lee, K.-H., Talneau, A., Le Gratiet, L., Robert-Philip, I., Sagnes, I., Beveratos, A.

Journal:

Applied Physics Letters

Year:

2009

Language:

english

File:

PDF, 526 KB

english, 2009

40

Compact dye laser on a chip fabricated by ultraviolet nanoimprint lithography

Peroz, Ch., Galas, J-C., Le Gratiet, L., Chen, Y., Shi, J.

Journal:

Applied Physics Letters

Year:

2006

Language:

english

File:

PDF, 410 KB

english, 2006

41

Anisotropic and Smooth Inductively Coupled Plasma Etching of III-V Laser Waveguides Using HBr-O[sub 2] Chemistry

Bouchoule, S., Azouigui, S., Guilet, S., Patriarche, G., Largeau, L., Martinez, A., Le Gratiet, L., Lemaitre, A., Lelarge, F.

Journal:

Journal of The Electrochemical Society

Year:

2008

Language:

english

File:

PDF, 726 KB

english, 2008

42

[IEEE Related Materials (IPRM) - Versailles, France (2008.05.25-2008.05.29)] 2008 20th International Conference on Indium Phosphide and Related Materials - Mechanism of anisotropy during inductively coupled plasma (ICP) etching of inp-based heterostructures for the fabrication of photonic devices

Gatilova, L., Bouchoule, S., Patriarche, G., Guilet, S., Le Gratiet, L., Largeau, L.

Year:

2008

Language:

english

File:

PDF, 2.83 MB

english, 2008

43

[IEEE Semiconducting and Semi-Insulating Materials Conference - Toulouse, France (29 April-3 May 1996)] Proceedings of Semiconducting and Semi-Insulating Materials Conference - Subnanosecond optical deflection in Van der Waals bonded GaAlAs-GaAs MQW: effects of carrier lifetime and electric field

Le Gratiet, L., Bedel, E., Grac, R., Fontaine, C., Pugnet, M.

Year:

1996

Language:

english

File:

PDF, 253 KB

english, 1996

44

Heterogeneous integration and precise alignment of InP-based photonic crystal lasers to complementary metal-oxide semiconductor fabricated silicon-on-insulator wire waveguides

Karle, T. J., Halioua, Y., Raineri, F., Monnier, P., Braive, R., Le Gratiet, L., Beaudoin, G., Sagnes, I., Roelkens, G., van Laere, F.

Journal:

Journal of Applied Physics

Year:

2010

Language:

english

File:

PDF, 1.16 MB

english, 2010

45

Photonic crystal coupled cavities with increased beaming and free space coupling efficiency

Haddadi, S., Yacomotti, A. M., Sagnes, I., Raineri, F., Beaudoin, G., Le Gratiet, L., Levenson, J. A.

Journal:

Applied Physics Letters

Year:

2013

Language:

english

File:

PDF, 1.81 MB

english, 2013

46

[IEEE 2014 26th International Conference on Indium Phosphide and Related Materials (IPRM) - Montpellier Cedex, France (2014.5.11-2014.5.15)] 26th International Conference on Indium Phosphide and Related Materials (IPRM) - Quantum dash based lasers for gas sensing

Papatryfonos, Konstantinos, Joshi, Siddarth, Merghem, Kamel, Bouchoule, Sophie, Guilet, Stephan, Gratiet, Luc Le, Martinez, Anthony, Ramdane, Abderrahim

Year:

2014

Language:

english

File:

PDF, 249 KB

english, 2014

47

[IEEE Related Materials (IPRM) - Versailles, France (2008.05.25-2008.05.29)] 2008 20th International Conference on Indium Phosphide and Related Materials - One step Nano Selective Area Growth of localized InAs/InP quantum dots for single photon source applications

Gogneau, N., Le Gratiet, L., Cambril, E., Beaudoin, G., Patriarche, G., Beveratos, A., Hostein, R., Robert-Philip, I., Sagnes, I.

Year:

2008

Language:

english

File:

PDF, 3.31 MB

english, 2008

48

[IEEE 2007 IEEE 19th International Conference on Indium Phosphide & Related Materials - Matsue, Japan (2007.05.14-2007.05.18)] 2007 IEEE 19th International Conference on Indium Phosphide & Related Materials - Processing of InP-Based Shallow Ridge Laser Waveguides Using a HBr ICP Plasma

Bouchoule, S., Azouigui, S., Patriarche, G., Guilet, S., le Gratiet, L., Martinez, A., Lelarge, F., Ramdane, A.

Year:

2007

Language:

english

File:

PDF, 3.20 MB

english, 2007

49

[IEEE Related Materials (IPRM) - Versailles, France (2008.05.25-2008.05.29)] 2008 20th International Conference on Indium Phosphide and Related Materials - Fabry-Perot laser diodes and DFB laser diodes emitting at 2.6μM for absorption spectroscopy

Barat, D., Vicet, A., Angellier, J., Rouillard, Y., Le Gratiet, L., Guilet, S., Martinez, A., Ramdane, A.

Year:

2008

Language:

english

File:

PDF, 2.25 MB

english, 2008

50

Bayesian Analysis of Hierarchical Multifidelity Codes

Le Gratiet, Loic

Journal:

SIAM/ASA Journal on Uncertainty Quantification

Year:

2013

Language:

english

File:

PDF, 551 KB

english, 2013

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